Microcantilever-Based MEMS Biosensor for Viral Pathogens
DOI:
https://doi.org/10.53799/xjzz1h42Keywords:
Microcantilever beam, COVID-19, Micro-Electromechanical System (MEMS), Pull-in voltage, Radio-Frequency (RF), Titanium Gold (Ti-Au)Abstract
Microcantilever-based MEMS (Micro-Electro-Mechanical Systems) sensors are rapidly emerging as powerful tools for detecting various viral diseases. This proposed study examines the pull-in voltage of different electromagnetic repulsive controlled microcantilever beams while using SARS-CoV-2 as sample. Electrostatic attraction needs a very high actuation voltage (applied voltage) in order to pull the microcantilever. The pull-in voltage is simulated by using the Finite Difference Time Domain (FDTD) method. This simulation results in the displacement of several non-piezoelectric materials in the microcantilever beam, as well as the capacitance for the applied electrostatic actuation voltage. Numerous microcantilever beam materials are compared in terms of pull-in voltage. The analytical data indicate that the pull-in voltage of a Ti-Au (4.978V) microcantilever beam is lower than nickel (6.55V), molybdenum (6.38V) and gold (5.26V) microcantilever beam. Ti-Au is more efficient in the circumstance of the COVID-19 test due to the lower pull-in voltage, high capacity and high sensitivity. Ti-Au is less costly and easier to maintain material.References
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